Domestic Production of Zirconium and Hafnium Metal Organic Precursors - SBIR Topic DON26BZ01-DV002
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This topic was temporarily posted by the Department of War SBIR Program on March 2nd 2026 and removed the following day.
We believe this topic is planned to be released once the SBIR program is reauthorized; however, this topic may ultimately be modified or withdrawn.
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Funding Amount:
Est. $2 Million.
Deadline to Apply:
Est. April 29th, 2026.
Objective:
Develop and demonstrate a pilot-scale manufacturing process for producing high purity tetrakis(dimethylamido)zirconium(IV) (TDMAZ), tetrakis(dimethylamido)hafnium(IV) (TDMAH) and related metal dimethylamide compounds, with a targeted annual production capacity exceeding 6,000 kg of TDMAZ.
Description:
The Department of the Navy is seeking a domestic source of critical chemical feedstocks including TDMAZ, TDMAH, and other metal dimethylamide compounds. These chemical feedstocks can be used as metal organic precursors for atomic layer deposition (ALD), chemical vapor deposition (CVD), and chemical vapor infiltration (CVI) of metal oxides, nitrides, and carbonitrides used in microelectronics and ceramic manufacturing [Refs 1-3]. While TDMAZ is a vital ceramic precursor for the electronics and semiconducting industry, this effort will also support the use of TDMAZ for the preparation of metal nitrides and carbonitrides for ceramics and ceramic matrix composites.
This SBIR topic seeks to establish a domestic manufacturing capability for the production of > 6,000 kg/year of TDMAZ. Synthesis of TDMAZ and other metal dimethylamides often involves pyrophoric and air/water sensitive reagents, and the proper storage and handling of these reagents is crucial for the development of a cost-effective and large-scale manufacturing process. Along with the production volumes mentioned above, the metal precursors must have a purity > 99% and a target retail price of < $4,000/kg of TDMAZ, preferably < $2,500/kg. The proposed manufacturing facility must be located in the United States or US territories, and the company owning and operating this manufacturing facility must be wholly US owned and based.
Who will win?
If you can achieve the objective above better than any other company on the market, you have a very high-likelihood of success and should apply.
Who is eligible to apply?
Any company that meets the following criteria:
For-profit company
U.S.-owned and controlled.
500 or fewer employees (including affiliates)
How Can BW&CO Help?
1) End-to-end support including, strategy, writing of the full proposal, and administrative & compliance support.
2) Proposal strategy and review.
3) Administrative & compliance support.
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